JPS4918264A - - Google Patents

Info

Publication number
JPS4918264A
JPS4918264A JP5691372A JP5691372A JPS4918264A JP S4918264 A JPS4918264 A JP S4918264A JP 5691372 A JP5691372 A JP 5691372A JP 5691372 A JP5691372 A JP 5691372A JP S4918264 A JPS4918264 A JP S4918264A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5691372A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5691372A priority Critical patent/JPS4918264A/ja
Publication of JPS4918264A publication Critical patent/JPS4918264A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5691372A 1972-06-09 1972-06-09 Pending JPS4918264A (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5691372A JPS4918264A (en:Method) 1972-06-09 1972-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5691372A JPS4918264A (en:Method) 1972-06-09 1972-06-09

Publications (1)

Publication Number Publication Date
JPS4918264A true JPS4918264A (en:Method) 1974-02-18

Family

ID=13040692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5691372A Pending JPS4918264A (en:Method) 1972-06-09 1972-06-09

Country Status (1)

Country Link
JP (1) JPS4918264A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381919A (ja) * 1986-09-26 1988-04-12 Tokuzo Sukegawa 超構造および多層膜の製作法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381919A (ja) * 1986-09-26 1988-04-12 Tokuzo Sukegawa 超構造および多層膜の製作法

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