JPS4918263A - - Google Patents
Info
- Publication number
- JPS4918263A JPS4918263A JP5719572A JP5719572A JPS4918263A JP S4918263 A JPS4918263 A JP S4918263A JP 5719572 A JP5719572 A JP 5719572A JP 5719572 A JP5719572 A JP 5719572A JP S4918263 A JPS4918263 A JP S4918263A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5719572A JPS5135827B2 (https=) | 1972-06-08 | 1972-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5719572A JPS5135827B2 (https=) | 1972-06-08 | 1972-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4918263A true JPS4918263A (https=) | 1974-02-18 |
| JPS5135827B2 JPS5135827B2 (https=) | 1976-10-05 |
Family
ID=13048692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5719572A Expired JPS5135827B2 (https=) | 1972-06-08 | 1972-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135827B2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4860622A (https=) * | 1971-11-26 | 1973-08-25 | ||
| JPS505562U (https=) * | 1973-05-17 | 1975-01-21 | ||
| JPS5340272A (en) * | 1976-09-23 | 1978-04-12 | Siemens Ag | Apparatus for diffusing semiconductor substrate |
| JPS53156463U (https=) * | 1977-05-16 | 1978-12-08 |
-
1972
- 1972-06-08 JP JP5719572A patent/JPS5135827B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4860622A (https=) * | 1971-11-26 | 1973-08-25 | ||
| JPS505562U (https=) * | 1973-05-17 | 1975-01-21 | ||
| JPS5340272A (en) * | 1976-09-23 | 1978-04-12 | Siemens Ag | Apparatus for diffusing semiconductor substrate |
| JPS53156463U (https=) * | 1977-05-16 | 1978-12-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5135827B2 (https=) | 1976-10-05 |