JPS4918263A - - Google Patents

Info

Publication number
JPS4918263A
JPS4918263A JP5719572A JP5719572A JPS4918263A JP S4918263 A JPS4918263 A JP S4918263A JP 5719572 A JP5719572 A JP 5719572A JP 5719572 A JP5719572 A JP 5719572A JP S4918263 A JPS4918263 A JP S4918263A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5719572A
Other languages
Japanese (ja)
Other versions
JPS5135827B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5719572A priority Critical patent/JPS5135827B2/ja
Publication of JPS4918263A publication Critical patent/JPS4918263A/ja
Publication of JPS5135827B2 publication Critical patent/JPS5135827B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5719572A 1972-06-08 1972-06-08 Expired JPS5135827B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5719572A JPS5135827B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5719572A JPS5135827B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4918263A true JPS4918263A (enrdf_load_stackoverflow) 1974-02-18
JPS5135827B2 JPS5135827B2 (enrdf_load_stackoverflow) 1976-10-05

Family

ID=13048692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5719572A Expired JPS5135827B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5135827B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860622A (enrdf_load_stackoverflow) * 1971-11-26 1973-08-25
JPS505562U (enrdf_load_stackoverflow) * 1973-05-17 1975-01-21
JPS5340272A (en) * 1976-09-23 1978-04-12 Siemens Ag Apparatus for diffusing semiconductor substrate
JPS53156463U (enrdf_load_stackoverflow) * 1977-05-16 1978-12-08

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860622A (enrdf_load_stackoverflow) * 1971-11-26 1973-08-25
JPS505562U (enrdf_load_stackoverflow) * 1973-05-17 1975-01-21
JPS5340272A (en) * 1976-09-23 1978-04-12 Siemens Ag Apparatus for diffusing semiconductor substrate
JPS53156463U (enrdf_load_stackoverflow) * 1977-05-16 1978-12-08

Also Published As

Publication number Publication date
JPS5135827B2 (enrdf_load_stackoverflow) 1976-10-05

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