JPS4918263A - - Google Patents

Info

Publication number
JPS4918263A
JPS4918263A JP5719572A JP5719572A JPS4918263A JP S4918263 A JPS4918263 A JP S4918263A JP 5719572 A JP5719572 A JP 5719572A JP 5719572 A JP5719572 A JP 5719572A JP S4918263 A JPS4918263 A JP S4918263A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5719572A
Other languages
Japanese (ja)
Other versions
JPS5135827B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5719572A priority Critical patent/JPS5135827B2/ja
Publication of JPS4918263A publication Critical patent/JPS4918263A/ja
Publication of JPS5135827B2 publication Critical patent/JPS5135827B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5719572A 1972-06-08 1972-06-08 Expired JPS5135827B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5719572A JPS5135827B2 (cs) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5719572A JPS5135827B2 (cs) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4918263A true JPS4918263A (cs) 1974-02-18
JPS5135827B2 JPS5135827B2 (cs) 1976-10-05

Family

ID=13048692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5719572A Expired JPS5135827B2 (cs) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5135827B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860622A (cs) * 1971-11-26 1973-08-25
JPS505562U (cs) * 1973-05-17 1975-01-21
JPS5340272A (en) * 1976-09-23 1978-04-12 Siemens Ag Apparatus for diffusing semiconductor substrate
JPS53156463U (cs) * 1977-05-16 1978-12-08

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860622A (cs) * 1971-11-26 1973-08-25
JPS542847B2 (cs) * 1971-11-26 1979-02-14
JPS505562U (cs) * 1973-05-17 1975-01-21
JPS5340272A (en) * 1976-09-23 1978-04-12 Siemens Ag Apparatus for diffusing semiconductor substrate
JPS53156463U (cs) * 1977-05-16 1978-12-08
JPS5737484Y2 (cs) * 1977-05-16 1982-08-18

Also Published As

Publication number Publication date
JPS5135827B2 (cs) 1976-10-05

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