JPS4917975A - - Google Patents
Info
- Publication number
- JPS4917975A JPS4917975A JP5669972A JP5669972A JPS4917975A JP S4917975 A JPS4917975 A JP S4917975A JP 5669972 A JP5669972 A JP 5669972A JP 5669972 A JP5669972 A JP 5669972A JP S4917975 A JPS4917975 A JP S4917975A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5669972A JPS5537099B2 (cs) | 1972-06-06 | 1972-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5669972A JPS5537099B2 (cs) | 1972-06-06 | 1972-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917975A true JPS4917975A (cs) | 1974-02-16 |
| JPS5537099B2 JPS5537099B2 (cs) | 1980-09-25 |
Family
ID=13034697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5669972A Expired JPS5537099B2 (cs) | 1972-06-06 | 1972-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5537099B2 (cs) |
-
1972
- 1972-06-06 JP JP5669972A patent/JPS5537099B2/ja not_active Expired
Non-Patent Citations (2)
| Title |
|---|
| APPLIED OPTICS=1966 * |
| PROCEEDINGS OF THE IEEE=1969 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5537099B2 (cs) | 1980-09-25 |