JPS4917755A - - Google Patents

Info

Publication number
JPS4917755A
JPS4917755A JP5597772A JP5597772A JPS4917755A JP S4917755 A JPS4917755 A JP S4917755A JP 5597772 A JP5597772 A JP 5597772A JP 5597772 A JP5597772 A JP 5597772A JP S4917755 A JPS4917755 A JP S4917755A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5597772A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5597772A priority Critical patent/JPS4917755A/ja
Publication of JPS4917755A publication Critical patent/JPS4917755A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5597772A 1972-06-07 1972-06-07 Pending JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5597772A JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-07 1972-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5597772A JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-07 1972-06-07

Publications (1)

Publication Number Publication Date
JPS4917755A true JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-16

Family

ID=13014118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5597772A Pending JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-07 1972-06-07

Country Status (1)

Country Link
JP (1) JPS4917755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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