JPS4917683A - - Google Patents

Info

Publication number
JPS4917683A
JPS4917683A JP5507572A JP5507572A JPS4917683A JP S4917683 A JPS4917683 A JP S4917683A JP 5507572 A JP5507572 A JP 5507572A JP 5507572 A JP5507572 A JP 5507572A JP S4917683 A JPS4917683 A JP S4917683A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5507572A
Other languages
Japanese (ja)
Other versions
JPS5525495B2 (online.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5507572A priority Critical patent/JPS5525495B2/ja
Publication of JPS4917683A publication Critical patent/JPS4917683A/ja
Publication of JPS5525495B2 publication Critical patent/JPS5525495B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5507572A 1972-06-05 1972-06-05 Expired JPS5525495B2 (online.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5507572A JPS5525495B2 (online.php) 1972-06-05 1972-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5507572A JPS5525495B2 (online.php) 1972-06-05 1972-06-05

Publications (2)

Publication Number Publication Date
JPS4917683A true JPS4917683A (online.php) 1974-02-16
JPS5525495B2 JPS5525495B2 (online.php) 1980-07-07

Family

ID=12988565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5507572A Expired JPS5525495B2 (online.php) 1972-06-05 1972-06-05

Country Status (1)

Country Link
JP (1) JPS5525495B2 (online.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366070U (online.php) * 1976-10-30 1978-06-03
JPS5599341U (online.php) * 1978-12-29 1980-07-10
JPS63131144A (ja) * 1986-11-21 1988-06-03 Canon Inc 原版収納カセツト

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366070U (online.php) * 1976-10-30 1978-06-03
JPS5599341U (online.php) * 1978-12-29 1980-07-10
JPS63131144A (ja) * 1986-11-21 1988-06-03 Canon Inc 原版収納カセツト

Also Published As

Publication number Publication date
JPS5525495B2 (online.php) 1980-07-07

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