JPS4917683A - - Google Patents

Info

Publication number
JPS4917683A
JPS4917683A JP5507572A JP5507572A JPS4917683A JP S4917683 A JPS4917683 A JP S4917683A JP 5507572 A JP5507572 A JP 5507572A JP 5507572 A JP5507572 A JP 5507572A JP S4917683 A JPS4917683 A JP S4917683A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5507572A
Other languages
Japanese (ja)
Other versions
JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5507572A priority Critical patent/JPS5525495B2/ja
Publication of JPS4917683A publication Critical patent/JPS4917683A/ja
Publication of JPS5525495B2 publication Critical patent/JPS5525495B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5507572A 1972-06-05 1972-06-05 Expired JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5507572A JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-05 1972-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5507572A JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-05 1972-06-05

Publications (2)

Publication Number Publication Date
JPS4917683A true JPS4917683A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-16
JPS5525495B2 JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-07

Family

ID=12988565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5507572A Expired JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-05 1972-06-05

Country Status (1)

Country Link
JP (1) JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366070U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-10-30 1978-06-03
JPS5599341U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-12-29 1980-07-10
JPS63131144A (ja) * 1986-11-21 1988-06-03 Canon Inc 原版収納カセツト

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366070U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-10-30 1978-06-03
JPS5599341U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-12-29 1980-07-10
JPS63131144A (ja) * 1986-11-21 1988-06-03 Canon Inc 原版収納カセツト

Also Published As

Publication number Publication date
JPS5525495B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-07

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