JPS4917673A - - Google Patents
Info
- Publication number
- JPS4917673A JPS4917673A JP47055778A JP5577872A JPS4917673A JP S4917673 A JPS4917673 A JP S4917673A JP 47055778 A JP47055778 A JP 47055778A JP 5577872 A JP5577872 A JP 5577872A JP S4917673 A JPS4917673 A JP S4917673A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5577872A JPS5543265B2 (enFirst) | 1972-06-05 | 1972-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5577872A JPS5543265B2 (enFirst) | 1972-06-05 | 1972-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917673A true JPS4917673A (enFirst) | 1974-02-16 |
| JPS5543265B2 JPS5543265B2 (enFirst) | 1980-11-05 |
Family
ID=13008333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5577872A Expired JPS5543265B2 (enFirst) | 1972-06-05 | 1972-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5543265B2 (enFirst) |
-
1972
- 1972-06-05 JP JP5577872A patent/JPS5543265B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5543265B2 (enFirst) | 1980-11-05 |