JPS4917543A - - Google Patents

Info

Publication number
JPS4917543A
JPS4917543A JP47058387A JP5838772A JPS4917543A JP S4917543 A JPS4917543 A JP S4917543A JP 47058387 A JP47058387 A JP 47058387A JP 5838772 A JP5838772 A JP 5838772A JP S4917543 A JPS4917543 A JP S4917543A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47058387A
Other languages
Japanese (ja)
Other versions
JPS5138460B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47058387A priority Critical patent/JPS5138460B2/ja
Publication of JPS4917543A publication Critical patent/JPS4917543A/ja
Publication of JPS5138460B2 publication Critical patent/JPS5138460B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sorption Type Refrigeration Machines (AREA)
JP47058387A 1972-06-12 1972-06-12 Expired JPS5138460B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47058387A JPS5138460B2 (enrdf_load_stackoverflow) 1972-06-12 1972-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47058387A JPS5138460B2 (enrdf_load_stackoverflow) 1972-06-12 1972-06-12

Publications (2)

Publication Number Publication Date
JPS4917543A true JPS4917543A (enrdf_load_stackoverflow) 1974-02-16
JPS5138460B2 JPS5138460B2 (enrdf_load_stackoverflow) 1976-10-21

Family

ID=13082915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47058387A Expired JPS5138460B2 (enrdf_load_stackoverflow) 1972-06-12 1972-06-12

Country Status (1)

Country Link
JP (1) JPS5138460B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side

Also Published As

Publication number Publication date
JPS5138460B2 (enrdf_load_stackoverflow) 1976-10-21

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