JPS4916685U - - Google Patents
Info
- Publication number
- JPS4916685U JPS4916685U JP5952072U JP5952072U JPS4916685U JP S4916685 U JPS4916685 U JP S4916685U JP 5952072 U JP5952072 U JP 5952072U JP 5952072 U JP5952072 U JP 5952072U JP S4916685 U JPS4916685 U JP S4916685U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5952072U JPS4916685U (de) | 1972-05-23 | 1972-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5952072U JPS4916685U (de) | 1972-05-23 | 1972-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4916685U true JPS4916685U (de) | 1974-02-12 |
Family
ID=27947344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5952072U Pending JPS4916685U (de) | 1972-05-23 | 1972-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4916685U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080216A (de) * | 1973-11-14 | 1975-06-30 | ||
| JPS59144136A (ja) * | 1983-02-08 | 1984-08-18 | Dainippon Screen Mfg Co Ltd | ウエハの回転形洗浄乾燥装置 |
-
1972
- 1972-05-23 JP JP5952072U patent/JPS4916685U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080216A (de) * | 1973-11-14 | 1975-06-30 | ||
| JPS59144136A (ja) * | 1983-02-08 | 1984-08-18 | Dainippon Screen Mfg Co Ltd | ウエハの回転形洗浄乾燥装置 |