JPS4915988B1 - - Google Patents
Info
- Publication number
- JPS4915988B1 JPS4915988B1 JP45000037A JP3770A JPS4915988B1 JP S4915988 B1 JPS4915988 B1 JP S4915988B1 JP 45000037 A JP45000037 A JP 45000037A JP 3770 A JP3770 A JP 3770A JP S4915988 B1 JPS4915988 B1 JP S4915988B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
-
- H10P14/263—
-
- H10P14/265—
-
- H10P14/3421—
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR182980 | 1968-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4915988B1 true JPS4915988B1 (enExample) | 1974-04-18 |
Family
ID=8659864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45000037A Pending JPS4915988B1 (enExample) | 1968-12-31 | 1970-01-05 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4915988B1 (enExample) |
| BE (1) | BE743828A (enExample) |
| DE (1) | DE2000096C3 (enExample) |
| FR (1) | FR1600341A (enExample) |
| GB (1) | GB1299610A (enExample) |
| NL (1) | NL159813B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7117428A (enExample) * | 1970-12-23 | 1972-06-27 | ||
| JPS5342230B2 (enExample) * | 1972-10-19 | 1978-11-09 | ||
| JPS49102652U (enExample) * | 1972-12-22 | 1974-09-04 | ||
| JPS5056873A (enExample) * | 1973-09-14 | 1975-05-17 | ||
| DE3036643C2 (de) * | 1980-09-29 | 1984-09-20 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zur Flüssigphasen-Epitaxie |
-
1968
- 1968-12-31 FR FR182980A patent/FR1600341A/fr not_active Expired
-
1969
- 1969-12-25 NL NL6919464.A patent/NL159813B/xx not_active IP Right Cessation
- 1969-12-29 BE BE743828D patent/BE743828A/xx not_active IP Right Cessation
- 1969-12-30 GB GB63247/69A patent/GB1299610A/en not_active Expired
-
1970
- 1970-01-02 DE DE2000096A patent/DE2000096C3/de not_active Expired
- 1970-01-05 JP JP45000037A patent/JPS4915988B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR1600341A (enExample) | 1970-07-20 |
| GB1299610A (en) | 1972-12-13 |
| BE743828A (enExample) | 1970-06-29 |
| DE2000096B2 (de) | 1977-09-15 |
| DE2000096A1 (de) | 1970-07-23 |
| NL159813B (nl) | 1979-03-15 |
| DE2000096C3 (de) | 1978-05-18 |
| NL6919464A (enExample) | 1970-07-02 |