JPS4915366A - - Google Patents
Info
- Publication number
- JPS4915366A JPS4915366A JP4870472A JP4870472A JPS4915366A JP S4915366 A JPS4915366 A JP S4915366A JP 4870472 A JP4870472 A JP 4870472A JP 4870472 A JP4870472 A JP 4870472A JP S4915366 A JPS4915366 A JP S4915366A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4870472A JPS4915366A (is") | 1972-05-17 | 1972-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4870472A JPS4915366A (is") | 1972-05-17 | 1972-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4915366A true JPS4915366A (is") | 1974-02-09 |
Family
ID=12810687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4870472A Pending JPS4915366A (is") | 1972-05-17 | 1972-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4915366A (is") |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS61121734U (is") * | 1985-01-18 | 1986-07-31 | ||
| JPS61268025A (ja) * | 1985-05-23 | 1986-11-27 | Oki Electric Ind Co Ltd | ウエハ−の熱処理装置 |
| JPS6437491A (en) * | 1987-08-03 | 1989-02-08 | Toshiba Ceramics Co | Silicon single crystal pulling-up apparatus |
| JPS6437490A (en) * | 1987-08-03 | 1989-02-08 | Toshiba Ceramics Co | Silicon single crystal pulling-up apparatus |
-
1972
- 1972-05-17 JP JP4870472A patent/JPS4915366A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS61121734U (is") * | 1985-01-18 | 1986-07-31 | ||
| JPS61268025A (ja) * | 1985-05-23 | 1986-11-27 | Oki Electric Ind Co Ltd | ウエハ−の熱処理装置 |
| JPS6437491A (en) * | 1987-08-03 | 1989-02-08 | Toshiba Ceramics Co | Silicon single crystal pulling-up apparatus |
| JPS6437490A (en) * | 1987-08-03 | 1989-02-08 | Toshiba Ceramics Co | Silicon single crystal pulling-up apparatus |