JPS4915136U - - Google Patents

Info

Publication number
JPS4915136U
JPS4915136U JP5692572U JP5692572U JPS4915136U JP S4915136 U JPS4915136 U JP S4915136U JP 5692572 U JP5692572 U JP 5692572U JP 5692572 U JP5692572 U JP 5692572U JP S4915136 U JPS4915136 U JP S4915136U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5692572U
Other languages
Japanese (ja)
Other versions
JPS5116371Y2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5692572U priority Critical patent/JPS5116371Y2/ja
Publication of JPS4915136U publication Critical patent/JPS4915136U/ja
Application granted granted Critical
Publication of JPS5116371Y2 publication Critical patent/JPS5116371Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5692572U 1972-05-16 1972-05-16 Expired JPS5116371Y2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5692572U JPS5116371Y2 (xx) 1972-05-16 1972-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5692572U JPS5116371Y2 (xx) 1972-05-16 1972-05-16

Publications (2)

Publication Number Publication Date
JPS4915136U true JPS4915136U (xx) 1974-02-08
JPS5116371Y2 JPS5116371Y2 (xx) 1976-04-30

Family

ID=27942441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5692572U Expired JPS5116371Y2 (xx) 1972-05-16 1972-05-16

Country Status (1)

Country Link
JP (1) JPS5116371Y2 (xx)

Also Published As

Publication number Publication date
JPS5116371Y2 (xx) 1976-04-30

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