JPS49146576U - - Google Patents

Info

Publication number
JPS49146576U
JPS49146576U JP4449673U JP4449673U JPS49146576U JP S49146576 U JPS49146576 U JP S49146576U JP 4449673 U JP4449673 U JP 4449673U JP 4449673 U JP4449673 U JP 4449673U JP S49146576 U JPS49146576 U JP S49146576U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4449673U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4449673U priority Critical patent/JPS49146576U/ja
Publication of JPS49146576U publication Critical patent/JPS49146576U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP4449673U 1973-04-13 1973-04-13 Pending JPS49146576U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4449673U JPS49146576U (cs) 1973-04-13 1973-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4449673U JPS49146576U (cs) 1973-04-13 1973-04-13

Publications (1)

Publication Number Publication Date
JPS49146576U true JPS49146576U (cs) 1974-12-18

Family

ID=28177500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4449673U Pending JPS49146576U (cs) 1973-04-13 1973-04-13

Country Status (1)

Country Link
JP (1) JPS49146576U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016131932A (ja) * 2015-01-20 2016-07-25 住友化学株式会社 排気ガス処理装置及び基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4122396Y1 (cs) * 1964-02-18 1966-11-08
JPS4510306Y1 (cs) * 1966-02-02 1970-05-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4122396Y1 (cs) * 1964-02-18 1966-11-08
JPS4510306Y1 (cs) * 1966-02-02 1970-05-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016131932A (ja) * 2015-01-20 2016-07-25 住友化学株式会社 排気ガス処理装置及び基板処理装置
WO2016117253A1 (ja) * 2015-01-20 2016-07-28 住友化学株式会社 排気ガス処理装置及び基板処理装置

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