JPS4914111B1 - - Google Patents
Info
- Publication number
- JPS4914111B1 JPS4914111B1 JP7912968A JP7912968A JPS4914111B1 JP S4914111 B1 JPS4914111 B1 JP S4914111B1 JP 7912968 A JP7912968 A JP 7912968A JP 7912968 A JP7912968 A JP 7912968A JP S4914111 B1 JPS4914111 B1 JP S4914111B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7912968A JPS4914111B1 (ja) | 1968-10-30 | 1968-10-30 | |
US872335A US3617822A (en) | 1967-12-05 | 1969-10-29 | Semiconductor integrated circuit |
SE1477969A SE362991B (ja) | 1968-10-30 | 1969-10-29 | |
BE740938A BE740938A (ja) | 1967-12-05 | 1969-10-29 | |
GB5322469A GB1287134A (en) | 1968-10-30 | 1969-10-30 | Semiconductor integrated circuit and method of making the same |
DE19691954771 DE1954771B2 (de) | 1967-12-05 | 1969-10-30 | Verfahren zur Herstellung einer integrierten Halbleiterschaltung |
NO429969A NO125997B (ja) | 1968-10-30 | 1969-10-30 | |
NL6916396A NL165004C (nl) | 1968-10-30 | 1969-10-30 | Geintegreerde halfgeleiderschakeling voorzien van een monokristallijn halfgeleidersubstraat en een uit de dampfase daarop aangebrachte halfgeleidende laag, bestaande uit een polykristallijn gebied en uit ten minste twee monokristallijne gebieden. |
FR6937345A FR2030578A6 (fr) | 1967-12-05 | 1969-10-30 | Procédé de fabrication de circuits semi-conducteurs intégrés et circuits ainsi obtenus |
AT1021169A AT310254B (de) | 1968-10-30 | 1969-10-30 | Integrierte Halbleiterschaltung |
CH1617269A CH496323A (de) | 1967-12-05 | 1969-10-30 | Verfahren zur Herstellung einer integrierten Halbleiterschaltung |
FR6942177A FR2030781A6 (fr) | 1967-12-05 | 1969-12-05 | Procédé de fabrication de circuits semi-conducteurs intégrés et circuits ainsi obtenus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7912968A JPS4914111B1 (ja) | 1968-10-30 | 1968-10-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4914111B1 true JPS4914111B1 (ja) | 1974-04-05 |
Family
ID=13681320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7912968A Pending JPS4914111B1 (ja) | 1967-12-05 | 1968-10-30 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS4914111B1 (ja) |
AT (1) | AT310254B (ja) |
-
1968
- 1968-10-30 JP JP7912968A patent/JPS4914111B1/ja active Pending
-
1969
- 1969-10-30 AT AT1021169A patent/AT310254B/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AT310254B (de) | 1973-09-25 |