JPS4914082A - - Google Patents

Info

Publication number
JPS4914082A
JPS4914082A JP47047682A JP4768272A JPS4914082A JP S4914082 A JPS4914082 A JP S4914082A JP 47047682 A JP47047682 A JP 47047682A JP 4768272 A JP4768272 A JP 4768272A JP S4914082 A JPS4914082 A JP S4914082A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47047682A
Other languages
Japanese (ja)
Other versions
JPS5135346B2 (US06826419-20041130-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47047682A priority Critical patent/JPS5135346B2/ja
Publication of JPS4914082A publication Critical patent/JPS4914082A/ja
Publication of JPS5135346B2 publication Critical patent/JPS5135346B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP47047682A 1972-05-16 1972-05-16 Expired JPS5135346B2 (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47047682A JPS5135346B2 (US06826419-20041130-M00005.png) 1972-05-16 1972-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47047682A JPS5135346B2 (US06826419-20041130-M00005.png) 1972-05-16 1972-05-16

Publications (2)

Publication Number Publication Date
JPS4914082A true JPS4914082A (US06826419-20041130-M00005.png) 1974-02-07
JPS5135346B2 JPS5135346B2 (US06826419-20041130-M00005.png) 1976-10-01

Family

ID=12782035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47047682A Expired JPS5135346B2 (US06826419-20041130-M00005.png) 1972-05-16 1972-05-16

Country Status (1)

Country Link
JP (1) JPS5135346B2 (US06826419-20041130-M00005.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156299A (en) * 1976-06-21 1977-12-26 Japan Atom Energy Res Inst High temperature ion irradiating device
JPS61116746A (ja) * 1984-09-19 1986-06-04 アプライド マテリアルズ インコ−ポレ−テツド 半導体ウエハをイオンインプランテ−シヨンする装置及び方法
JP2002184713A (ja) * 2000-12-12 2002-06-28 Denso Corp 炭化珪素半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156299A (en) * 1976-06-21 1977-12-26 Japan Atom Energy Res Inst High temperature ion irradiating device
JPS61116746A (ja) * 1984-09-19 1986-06-04 アプライド マテリアルズ インコ−ポレ−テツド 半導体ウエハをイオンインプランテ−シヨンする装置及び方法
JPH06111752A (ja) * 1984-09-19 1994-04-22 Applied Materials Inc 半導体ウェハをイオンインプランテーションする装置及び方法
JP2002184713A (ja) * 2000-12-12 2002-06-28 Denso Corp 炭化珪素半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5135346B2 (US06826419-20041130-M00005.png) 1976-10-01

Similar Documents

Publication Publication Date Title
JPS4825033A (US06826419-20041130-M00005.png)
JPS4914082A (US06826419-20041130-M00005.png)
JPS491250U (US06826419-20041130-M00005.png)
JPS5148348Y2 (US06826419-20041130-M00005.png)
JPS4940312A (US06826419-20041130-M00005.png)
JPS48105847U (US06826419-20041130-M00005.png)
JPS5239939Y2 (US06826419-20041130-M00005.png)
JPS524516Y2 (US06826419-20041130-M00005.png)
JPS4883281U (US06826419-20041130-M00005.png)
JPS4992290A (US06826419-20041130-M00005.png)
JPS4990898U (US06826419-20041130-M00005.png)
JPS48112286U (US06826419-20041130-M00005.png)
JPS4935666U (US06826419-20041130-M00005.png)
JPS4925227U (US06826419-20041130-M00005.png)
CH583182A5 (US06826419-20041130-M00005.png)
CH577391A5 (US06826419-20041130-M00005.png)
CH456972A4 (US06826419-20041130-M00005.png)
CH1733573A4 (US06826419-20041130-M00005.png)
BG20980A1 (US06826419-20041130-M00005.png)
DD104237A5 (US06826419-20041130-M00005.png)
CH586042A5 (US06826419-20041130-M00005.png)
CH585385A5 (US06826419-20041130-M00005.png)
NL7209117A (US06826419-20041130-M00005.png)
CH567359A5 (US06826419-20041130-M00005.png)
CH569331A5 (US06826419-20041130-M00005.png)