JPS4913424B1 - - Google Patents
Info
- Publication number
- JPS4913424B1 JPS4913424B1 JP5254470A JP5254470A JPS4913424B1 JP S4913424 B1 JPS4913424 B1 JP S4913424B1 JP 5254470 A JP5254470 A JP 5254470A JP 5254470 A JP5254470 A JP 5254470A JP S4913424 B1 JPS4913424 B1 JP S4913424B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5254470A JPS4913424B1 (en) | 1970-06-17 | 1970-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5254470A JPS4913424B1 (en) | 1970-06-17 | 1970-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4913424B1 true JPS4913424B1 (en) | 1974-03-30 |
Family
ID=12917713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5254470A Pending JPS4913424B1 (en) | 1970-06-17 | 1970-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4913424B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020136044A3 (en) * | 2018-12-28 | 2020-08-13 | Asml Netherlands B.V. | Pulsed charged-particle beam system |
-
1970
- 1970-06-17 JP JP5254470A patent/JPS4913424B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020136044A3 (en) * | 2018-12-28 | 2020-08-13 | Asml Netherlands B.V. | Pulsed charged-particle beam system |
| CN113412529A (en) * | 2018-12-28 | 2021-09-17 | Asml荷兰有限公司 | Pulsed charged particle beam system |