JPS49131015A - - Google Patents

Info

Publication number
JPS49131015A
JPS49131015A JP48042662A JP4266273A JPS49131015A JP S49131015 A JPS49131015 A JP S49131015A JP 48042662 A JP48042662 A JP 48042662A JP 4266273 A JP4266273 A JP 4266273A JP S49131015 A JPS49131015 A JP S49131015A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48042662A
Other languages
Japanese (ja)
Other versions
JPS5928841B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48042662A priority Critical patent/JPS5928841B2/ja
Publication of JPS49131015A publication Critical patent/JPS49131015A/ja
Publication of JPS5928841B2 publication Critical patent/JPS5928841B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Analysis (AREA)
JP48042662A 1973-04-17 1973-04-17 パタ−ン走査装置 Expired JPS5928841B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48042662A JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48042662A JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Publications (2)

Publication Number Publication Date
JPS49131015A true JPS49131015A (cs) 1974-12-16
JPS5928841B2 JPS5928841B2 (ja) 1984-07-16

Family

ID=12642210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48042662A Expired JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Country Status (1)

Country Link
JP (1) JPS5928841B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118145A (en) * 1977-03-25 1978-10-16 Fujitsu Ltd Detecting method of light beam position
JPS5654038A (en) * 1979-10-08 1981-05-13 Toshiba Corp Checking device for shape of photomask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118145A (en) * 1977-03-25 1978-10-16 Fujitsu Ltd Detecting method of light beam position
JPS5654038A (en) * 1979-10-08 1981-05-13 Toshiba Corp Checking device for shape of photomask

Also Published As

Publication number Publication date
JPS5928841B2 (ja) 1984-07-16

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