JPS49121479A - - Google Patents
Info
- Publication number
- JPS49121479A JPS49121479A JP3147173A JP3147173A JPS49121479A JP S49121479 A JPS49121479 A JP S49121479A JP 3147173 A JP3147173 A JP 3147173A JP 3147173 A JP3147173 A JP 3147173A JP S49121479 A JPS49121479 A JP S49121479A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3147173A JPS49121479A (es) | 1973-03-20 | 1973-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3147173A JPS49121479A (es) | 1973-03-20 | 1973-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49121479A true JPS49121479A (es) | 1974-11-20 |
Family
ID=12332164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3147173A Pending JPS49121479A (es) | 1973-03-20 | 1973-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49121479A (es) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3140966A (en) * | 1962-05-29 | 1964-07-14 | Siemens Ag | Vapor deposition onto stacked semiconductor wafers followed by particular cooling |
| US3140965A (en) * | 1961-07-22 | 1964-07-14 | Siemens Ag | Vapor deposition onto stacked semiconductor wafers followed by particular cooling |
| US3142596A (en) * | 1960-10-10 | 1964-07-28 | Bell Telephone Labor Inc | Epitaxial deposition onto semiconductor wafers through an interaction between the wafers and the support material |
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1973
- 1973-03-20 JP JP3147173A patent/JPS49121479A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3142596A (en) * | 1960-10-10 | 1964-07-28 | Bell Telephone Labor Inc | Epitaxial deposition onto semiconductor wafers through an interaction between the wafers and the support material |
| US3140965A (en) * | 1961-07-22 | 1964-07-14 | Siemens Ag | Vapor deposition onto stacked semiconductor wafers followed by particular cooling |
| US3140966A (en) * | 1962-05-29 | 1964-07-14 | Siemens Ag | Vapor deposition onto stacked semiconductor wafers followed by particular cooling |