JPS4911658U - - Google Patents

Info

Publication number
JPS4911658U
JPS4911658U JP5392472U JP5392472U JPS4911658U JP S4911658 U JPS4911658 U JP S4911658U JP 5392472 U JP5392472 U JP 5392472U JP 5392472 U JP5392472 U JP 5392472U JP S4911658 U JPS4911658 U JP S4911658U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5392472U
Other languages
Japanese (ja)
Other versions
JPS5315246Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5392472U priority Critical patent/JPS5315246Y2/ja
Publication of JPS4911658U publication Critical patent/JPS4911658U/ja
Application granted granted Critical
Publication of JPS5315246Y2 publication Critical patent/JPS5315246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Connecting Device With Holders (AREA)
JP5392472U 1972-05-08 1972-05-08 Expired JPS5315246Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (en) 1972-05-08 1972-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (en) 1972-05-08 1972-05-08

Publications (2)

Publication Number Publication Date
JPS4911658U true JPS4911658U (en) 1974-01-31
JPS5315246Y2 JPS5315246Y2 (en) 1978-04-21

Family

ID=27936811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5392472U Expired JPS5315246Y2 (en) 1972-05-08 1972-05-08

Country Status (1)

Country Link
JP (1) JPS5315246Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148051U (en) * 1976-05-06 1977-11-09
JPS5459263U (en) * 1977-10-03 1979-04-24
JPH02292196A (en) * 1989-04-28 1990-12-03 Nidek Co Ltd Wafer transfer device
JPH04103652U (en) * 1991-02-18 1992-09-07 株式会社富士通宮城エレクトロニクス Vacuum tweezers
JPH05206248A (en) * 1992-01-28 1993-08-13 Nec Kyushu Ltd Wafer holder

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148051U (en) * 1976-05-06 1977-11-09
JPS5729308Y2 (en) * 1976-05-06 1982-06-26
JPS5459263U (en) * 1977-10-03 1979-04-24
JPS5527240Y2 (en) * 1977-10-03 1980-06-30
JPH02292196A (en) * 1989-04-28 1990-12-03 Nidek Co Ltd Wafer transfer device
JPH04103652U (en) * 1991-02-18 1992-09-07 株式会社富士通宮城エレクトロニクス Vacuum tweezers
JPH05206248A (en) * 1992-01-28 1993-08-13 Nec Kyushu Ltd Wafer holder

Also Published As

Publication number Publication date
JPS5315246Y2 (en) 1978-04-21

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