JPS49116439U - - Google Patents
Info
- Publication number
- JPS49116439U JPS49116439U JP1488573U JP1488573U JPS49116439U JP S49116439 U JPS49116439 U JP S49116439U JP 1488573 U JP1488573 U JP 1488573U JP 1488573 U JP1488573 U JP 1488573U JP S49116439 U JPS49116439 U JP S49116439U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973014885U JPS5345095Y2 (enExample) | 1973-02-02 | 1973-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973014885U JPS5345095Y2 (enExample) | 1973-02-02 | 1973-02-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49116439U true JPS49116439U (enExample) | 1974-10-04 |
| JPS5345095Y2 JPS5345095Y2 (enExample) | 1978-10-28 |
Family
ID=28094407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973014885U Expired JPS5345095Y2 (enExample) | 1973-02-02 | 1973-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5345095Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010113299A1 (ja) * | 2009-04-01 | 2010-10-07 | 電気化学工業株式会社 | 気相反応装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1924997A1 (de) * | 1969-05-16 | 1970-11-19 | Siemens Ag | Vorrichtung zum epitaktischen Abscheiden von Halbleitermaterial |
| JPS5018471A (enExample) * | 1973-05-31 | 1975-02-26 |
-
1973
- 1973-02-02 JP JP1973014885U patent/JPS5345095Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1924997A1 (de) * | 1969-05-16 | 1970-11-19 | Siemens Ag | Vorrichtung zum epitaktischen Abscheiden von Halbleitermaterial |
| JPS5018471A (enExample) * | 1973-05-31 | 1975-02-26 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010113299A1 (ja) * | 2009-04-01 | 2010-10-07 | 電気化学工業株式会社 | 気相反応装置 |
| JP5511795B2 (ja) * | 2009-04-01 | 2014-06-04 | 電気化学工業株式会社 | 気相反応装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5345095Y2 (enExample) | 1978-10-28 |