JPS49115261A - - Google Patents
Info
- Publication number
- JPS49115261A JPS49115261A JP48024842A JP2484273A JPS49115261A JP S49115261 A JPS49115261 A JP S49115261A JP 48024842 A JP48024842 A JP 48024842A JP 2484273 A JP2484273 A JP 2484273A JP S49115261 A JPS49115261 A JP S49115261A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48024842A JPS5756176B2 (cs) | 1973-03-01 | 1973-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48024842A JPS5756176B2 (cs) | 1973-03-01 | 1973-03-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49115261A true JPS49115261A (cs) | 1974-11-02 |
| JPS5756176B2 JPS5756176B2 (cs) | 1982-11-29 |
Family
ID=12149452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48024842A Expired JPS5756176B2 (cs) | 1973-03-01 | 1973-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5756176B2 (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086746A (ja) * | 1983-09-17 | 1985-05-16 | ライボルト・アクチェンゲゼルシャフト | 電子銃 |
| US7777194B2 (en) | 2007-03-14 | 2010-08-17 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS473666U (cs) * | 1971-02-03 | 1972-09-06 |
-
1973
- 1973-03-01 JP JP48024842A patent/JPS5756176B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS473666U (cs) * | 1971-02-03 | 1972-09-06 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086746A (ja) * | 1983-09-17 | 1985-05-16 | ライボルト・アクチェンゲゼルシャフト | 電子銃 |
| US7777194B2 (en) | 2007-03-14 | 2010-08-17 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
| US11139139B2 (en) | 2018-06-28 | 2021-10-05 | Hitaclii High-Tech Corporation | Charged particle beam generator and charged particle beam apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5756176B2 (cs) | 1982-11-29 |