JPS491141A - - Google Patents

Info

Publication number
JPS491141A
JPS491141A JP47038538A JP3853872A JPS491141A JP S491141 A JPS491141 A JP S491141A JP 47038538 A JP47038538 A JP 47038538A JP 3853872 A JP3853872 A JP 3853872A JP S491141 A JPS491141 A JP S491141A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47038538A
Other languages
Japanese (ja)
Other versions
JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47038538A priority Critical patent/JPS5230096B2/ja
Publication of JPS491141A publication Critical patent/JPS491141A/ja
Publication of JPS5230096B2 publication Critical patent/JPS5230096B2/ja
Expired legal-status Critical Current

Links

JP47038538A 1972-04-17 1972-04-17 Expired JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47038538A JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-17 1972-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47038538A JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-17 1972-04-17

Publications (2)

Publication Number Publication Date
JPS491141A true JPS491141A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-08
JPS5230096B2 JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-05

Family

ID=12528048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47038538A Expired JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-17 1972-04-17

Country Status (1)

Country Link
JP (1) JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6171955A (ja) * 1984-09-12 1986-04-12 Toshiba Corp 研磨方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6171955A (ja) * 1984-09-12 1986-04-12 Toshiba Corp 研磨方法及びその装置

Also Published As

Publication number Publication date
JPS5230096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-05

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