JPS4911356A - - Google Patents
Info
- Publication number
- JPS4911356A JPS4911356A JP5447472A JP5447472A JPS4911356A JP S4911356 A JPS4911356 A JP S4911356A JP 5447472 A JP5447472 A JP 5447472A JP 5447472 A JP5447472 A JP 5447472A JP S4911356 A JPS4911356 A JP S4911356A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5447472A JPS4911356A (sv) | 1972-05-31 | 1972-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5447472A JPS4911356A (sv) | 1972-05-31 | 1972-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4911356A true JPS4911356A (sv) | 1974-01-31 |
Family
ID=12971656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5447472A Pending JPS4911356A (sv) | 1972-05-31 | 1972-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4911356A (sv) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62168415U (sv) * | 1986-04-17 | 1987-10-26 | ||
JPH0253U (sv) * | 1988-06-03 | 1990-01-05 | ||
JP2009085968A (ja) * | 2004-03-30 | 2009-04-23 | Asml Holding Nv | 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置 |
JP2013501213A (ja) * | 2009-07-31 | 2013-01-10 | エーエスエムエル ホールディング エヌ.ブイ. | 低圧近接センサおよび高圧近接センサ |
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1972
- 1972-05-31 JP JP5447472A patent/JPS4911356A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62168415U (sv) * | 1986-04-17 | 1987-10-26 | ||
JPH0253U (sv) * | 1988-06-03 | 1990-01-05 | ||
JP2009085968A (ja) * | 2004-03-30 | 2009-04-23 | Asml Holding Nv | 圧力センサ、近接センサおよびリソグラフィトポグラフィマッピング装置 |
JP2013501213A (ja) * | 2009-07-31 | 2013-01-10 | エーエスエムエル ホールディング エヌ.ブイ. | 低圧近接センサおよび高圧近接センサ |
US9358696B2 (en) | 2009-07-31 | 2016-06-07 | Asml Holding N.V. | Low and high pressure proximity sensors |