JPS49111478U - - Google Patents
Info
- Publication number
- JPS49111478U JPS49111478U JP12717772U JP12717772U JPS49111478U JP S49111478 U JPS49111478 U JP S49111478U JP 12717772 U JP12717772 U JP 12717772U JP 12717772 U JP12717772 U JP 12717772U JP S49111478 U JPS49111478 U JP S49111478U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12717772U JPS49111478U (de) | 1972-11-06 | 1972-11-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12717772U JPS49111478U (de) | 1972-11-06 | 1972-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS49111478U true JPS49111478U (de) | 1974-09-24 |
Family
ID=28380756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12717772U Pending JPS49111478U (de) | 1972-11-06 | 1972-11-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS49111478U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59184963U (ja) * | 1983-05-30 | 1984-12-08 | シャープ株式会社 | ノズル洗浄装置 |
JP2011131188A (ja) * | 2009-12-25 | 2011-07-07 | Tokyo Electron Ltd | 薬液供給ノズル及び薬液供給方法 |
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1972
- 1972-11-06 JP JP12717772U patent/JPS49111478U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59184963U (ja) * | 1983-05-30 | 1984-12-08 | シャープ株式会社 | ノズル洗浄装置 |
JP2011131188A (ja) * | 2009-12-25 | 2011-07-07 | Tokyo Electron Ltd | 薬液供給ノズル及び薬液供給方法 |