JPS4911073A - - Google Patents
Info
- Publication number
- JPS4911073A JPS4911073A JP5164972A JP5164972A JPS4911073A JP S4911073 A JPS4911073 A JP S4911073A JP 5164972 A JP5164972 A JP 5164972A JP 5164972 A JP5164972 A JP 5164972A JP S4911073 A JPS4911073 A JP S4911073A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5164972A JPS4911073A (en) | 1972-05-26 | 1972-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5164972A JPS4911073A (en) | 1972-05-26 | 1972-05-26 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6897780A Division JPS55163858A (en) | 1980-05-26 | 1980-05-26 | Device for positioning pellet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4911073A true JPS4911073A (en) | 1974-01-31 |
Family
ID=12892696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5164972A Pending JPS4911073A (en) | 1972-05-26 | 1972-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4911073A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619032U (en) * | 1979-07-20 | 1981-02-19 | ||
| JP2016072305A (en) * | 2014-09-26 | 2016-05-09 | 富士電機株式会社 | Semiconductor device manufacturing apparatus and semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS443578Y1 (en) * | 1966-06-18 | 1969-02-08 | ||
| JPS4828961A (en) * | 1971-08-20 | 1973-04-17 |
-
1972
- 1972-05-26 JP JP5164972A patent/JPS4911073A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS443578Y1 (en) * | 1966-06-18 | 1969-02-08 | ||
| JPS4828961A (en) * | 1971-08-20 | 1973-04-17 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619032U (en) * | 1979-07-20 | 1981-02-19 | ||
| JPS6221010Y2 (en) * | 1979-07-20 | 1987-05-28 | ||
| JP2016072305A (en) * | 2014-09-26 | 2016-05-09 | 富士電機株式会社 | Semiconductor device manufacturing apparatus and semiconductor device |