JPS49109223A - - Google Patents
Info
- Publication number
- JPS49109223A JPS49109223A JP2024173A JP2024173A JPS49109223A JP S49109223 A JPS49109223 A JP S49109223A JP 2024173 A JP2024173 A JP 2024173A JP 2024173 A JP2024173 A JP 2024173A JP S49109223 A JPS49109223 A JP S49109223A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024173A JPS49109223A (xx) | 1973-02-21 | 1973-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024173A JPS49109223A (xx) | 1973-02-21 | 1973-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49109223A true JPS49109223A (xx) | 1974-10-17 |
Family
ID=12021686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024173A Pending JPS49109223A (xx) | 1973-02-21 | 1973-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49109223A (xx) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156286A (ja) * | 1984-07-25 | 1986-03-20 | Toshiba Battery Co Ltd | アルカリ電池 |
| US6309560B1 (en) * | 1996-12-09 | 2001-10-30 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
| US6569350B2 (en) | 1996-12-09 | 2003-05-27 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
| US6593239B2 (en) | 1996-12-09 | 2003-07-15 | Cabot Microelectronics Corp. | Chemical mechanical polishing method useful for copper substrates |
| US6620037B2 (en) | 1998-03-18 | 2003-09-16 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
-
1973
- 1973-02-21 JP JP2024173A patent/JPS49109223A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156286A (ja) * | 1984-07-25 | 1986-03-20 | Toshiba Battery Co Ltd | アルカリ電池 |
| JPS6224512B2 (xx) * | 1984-07-25 | 1987-05-28 | Toshiba Battery | |
| US6309560B1 (en) * | 1996-12-09 | 2001-10-30 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
| US6569350B2 (en) | 1996-12-09 | 2003-05-27 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
| US6593239B2 (en) | 1996-12-09 | 2003-07-15 | Cabot Microelectronics Corp. | Chemical mechanical polishing method useful for copper substrates |
| US6620037B2 (en) | 1998-03-18 | 2003-09-16 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
| US7381648B2 (en) | 1998-03-18 | 2008-06-03 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |