JPS4910760A - - Google Patents
Info
- Publication number
- JPS4910760A JPS4910760A JP5170472A JP5170472A JPS4910760A JP S4910760 A JPS4910760 A JP S4910760A JP 5170472 A JP5170472 A JP 5170472A JP 5170472 A JP5170472 A JP 5170472A JP S4910760 A JPS4910760 A JP S4910760A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5170472A JPS4910760A (enExample) | 1972-05-26 | 1972-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5170472A JPS4910760A (enExample) | 1972-05-26 | 1972-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4910760A true JPS4910760A (enExample) | 1974-01-30 |
Family
ID=12894269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5170472A Pending JPS4910760A (enExample) | 1972-05-26 | 1972-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4910760A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06120107A (ja) * | 1992-09-30 | 1994-04-28 | Ushio Inc | 共焦点検出器による距離測定方法及びプロキシミティ露光装置におけるマスクとワークの距離測定方法。 |
-
1972
- 1972-05-26 JP JP5170472A patent/JPS4910760A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06120107A (ja) * | 1992-09-30 | 1994-04-28 | Ushio Inc | 共焦点検出器による距離測定方法及びプロキシミティ露光装置におけるマスクとワークの距離測定方法。 |