JPS49106977A - - Google Patents
Info
- Publication number
- JPS49106977A JPS49106977A JP1921373A JP1921373A JPS49106977A JP S49106977 A JPS49106977 A JP S49106977A JP 1921373 A JP1921373 A JP 1921373A JP 1921373 A JP1921373 A JP 1921373A JP S49106977 A JPS49106977 A JP S49106977A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1921373A JPS5228108B2 (ja) | 1973-02-19 | 1973-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1921373A JPS5228108B2 (ja) | 1973-02-19 | 1973-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49106977A true JPS49106977A (ja) | 1974-10-11 |
| JPS5228108B2 JPS5228108B2 (ja) | 1977-07-25 |
Family
ID=11993079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1921373A Expired JPS5228108B2 (ja) | 1973-02-19 | 1973-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5228108B2 (ja) |
-
1973
- 1973-02-19 JP JP1921373A patent/JPS5228108B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5228108B2 (ja) | 1977-07-25 |