JPS49105474A - - Google Patents

Info

Publication number
JPS49105474A
JPS49105474A JP1473573A JP1473573A JPS49105474A JP S49105474 A JPS49105474 A JP S49105474A JP 1473573 A JP1473573 A JP 1473573A JP 1473573 A JP1473573 A JP 1473573A JP S49105474 A JPS49105474 A JP S49105474A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1473573A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1473573A priority Critical patent/JPS49105474A/ja
Publication of JPS49105474A publication Critical patent/JPS49105474A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1473573A 1973-02-07 1973-02-07 Pending JPS49105474A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1473573A JPS49105474A (enrdf_load_stackoverflow) 1973-02-07 1973-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1473573A JPS49105474A (enrdf_load_stackoverflow) 1973-02-07 1973-02-07

Publications (1)

Publication Number Publication Date
JPS49105474A true JPS49105474A (enrdf_load_stackoverflow) 1974-10-05

Family

ID=11869367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1473573A Pending JPS49105474A (enrdf_load_stackoverflow) 1973-02-07 1973-02-07

Country Status (1)

Country Link
JP (1) JPS49105474A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757246A (en) * 1980-09-25 1982-04-06 Fuji Photo Film Co Ltd Detecting and measuring apparatus for flaw
JPS58111706A (ja) * 1981-12-24 1983-07-02 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション マスクの検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757246A (en) * 1980-09-25 1982-04-06 Fuji Photo Film Co Ltd Detecting and measuring apparatus for flaw
JPS58111706A (ja) * 1981-12-24 1983-07-02 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション マスクの検査方法

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