JPS49105474A - - Google Patents
Info
- Publication number
- JPS49105474A JPS49105474A JP1473573A JP1473573A JPS49105474A JP S49105474 A JPS49105474 A JP S49105474A JP 1473573 A JP1473573 A JP 1473573A JP 1473573 A JP1473573 A JP 1473573A JP S49105474 A JPS49105474 A JP S49105474A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1473573A JPS49105474A (OSRAM) | 1973-02-07 | 1973-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1473573A JPS49105474A (OSRAM) | 1973-02-07 | 1973-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49105474A true JPS49105474A (OSRAM) | 1974-10-05 |
Family
ID=11869367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1473573A Pending JPS49105474A (OSRAM) | 1973-02-07 | 1973-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49105474A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757246A (en) * | 1980-09-25 | 1982-04-06 | Fuji Photo Film Co Ltd | Detecting and measuring apparatus for flaw |
| JPS58111706A (ja) * | 1981-12-24 | 1983-07-02 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | マスクの検査方法 |
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1973
- 1973-02-07 JP JP1473573A patent/JPS49105474A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757246A (en) * | 1980-09-25 | 1982-04-06 | Fuji Photo Film Co Ltd | Detecting and measuring apparatus for flaw |
| JPS58111706A (ja) * | 1981-12-24 | 1983-07-02 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | マスクの検査方法 |