JPS49105472A - - Google Patents
Info
- Publication number
- JPS49105472A JPS49105472A JP1470873A JP1470873A JPS49105472A JP S49105472 A JPS49105472 A JP S49105472A JP 1470873 A JP1470873 A JP 1470873A JP 1470873 A JP1470873 A JP 1470873A JP S49105472 A JPS49105472 A JP S49105472A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470873A JPS49105472A (cs) | 1973-02-07 | 1973-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470873A JPS49105472A (cs) | 1973-02-07 | 1973-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49105472A true JPS49105472A (cs) | 1974-10-05 |
Family
ID=11868652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1470873A Pending JPS49105472A (cs) | 1973-02-07 | 1973-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49105472A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5271372U (cs) * | 1975-11-18 | 1977-05-27 | ||
| JP2004128295A (ja) * | 2002-10-04 | 2004-04-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理システム |
-
1973
- 1973-02-07 JP JP1470873A patent/JPS49105472A/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| IBM TECHNICAL DISCLOSURE BULLETIN#V13#N7=1970 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5271372U (cs) * | 1975-11-18 | 1977-05-27 | ||
| JP2004128295A (ja) * | 2002-10-04 | 2004-04-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理システム |