JPS49105472A - - Google Patents

Info

Publication number
JPS49105472A
JPS49105472A JP1470873A JP1470873A JPS49105472A JP S49105472 A JPS49105472 A JP S49105472A JP 1470873 A JP1470873 A JP 1470873A JP 1470873 A JP1470873 A JP 1470873A JP S49105472 A JPS49105472 A JP S49105472A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1470873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1470873A priority Critical patent/JPS49105472A/ja
Publication of JPS49105472A publication Critical patent/JPS49105472A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1470873A 1973-02-07 1973-02-07 Pending JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1470873A JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-07 1973-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1470873A JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-07 1973-02-07

Publications (1)

Publication Number Publication Date
JPS49105472A true JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-05

Family

ID=11868652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1470873A Pending JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-07 1973-02-07

Country Status (1)

Country Link
JP (1) JPS49105472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271372U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-18 1977-05-27
JP2004128295A (ja) * 2002-10-04 2004-04-22 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理システム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN#V13#N7=1970 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271372U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-18 1977-05-27
JP2004128295A (ja) * 2002-10-04 2004-04-22 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理システム

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