JPS49103687A - - Google Patents
Info
- Publication number
- JPS49103687A JPS49103687A JP1241373A JP1241373A JPS49103687A JP S49103687 A JPS49103687 A JP S49103687A JP 1241373 A JP1241373 A JP 1241373A JP 1241373 A JP1241373 A JP 1241373A JP S49103687 A JPS49103687 A JP S49103687A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1241373A JPS5546573B2 (OSRAM) | 1973-02-01 | 1973-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1241373A JPS5546573B2 (OSRAM) | 1973-02-01 | 1973-02-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49103687A true JPS49103687A (OSRAM) | 1974-10-01 |
| JPS5546573B2 JPS5546573B2 (OSRAM) | 1980-11-25 |
Family
ID=11804563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1241373A Expired JPS5546573B2 (OSRAM) | 1973-02-01 | 1973-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5546573B2 (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123009Y1 (OSRAM) * | 1974-09-19 | 1976-06-14 | ||
| JPS5272247A (en) * | 1975-12-12 | 1977-06-16 | Agency Of Ind Science & Technol | Passing type photodetector |
| JP2014146671A (ja) * | 2013-01-29 | 2014-08-14 | Arufakusu Kk | レーザ光のプロファイル測定方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102432857B1 (ko) | 2017-09-01 | 2022-08-16 | 삼성전자주식회사 | 플라즈마 처리 장치 및 이를 이용한 반도체 소자의 제조 방법 |
-
1973
- 1973-02-01 JP JP1241373A patent/JPS5546573B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123009Y1 (OSRAM) * | 1974-09-19 | 1976-06-14 | ||
| JPS5272247A (en) * | 1975-12-12 | 1977-06-16 | Agency Of Ind Science & Technol | Passing type photodetector |
| JP2014146671A (ja) * | 2013-01-29 | 2014-08-14 | Arufakusu Kk | レーザ光のプロファイル測定方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5546573B2 (OSRAM) | 1980-11-25 |