JPS4910179A - - Google Patents

Info

Publication number
JPS4910179A
JPS4910179A JP5293072A JP5293072A JPS4910179A JP S4910179 A JPS4910179 A JP S4910179A JP 5293072 A JP5293072 A JP 5293072A JP 5293072 A JP5293072 A JP 5293072A JP S4910179 A JPS4910179 A JP S4910179A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5293072A
Other languages
Japanese (ja)
Other versions
JPS5438593B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5293072A priority Critical patent/JPS5438593B2/ja
Publication of JPS4910179A publication Critical patent/JPS4910179A/ja
Publication of JPS5438593B2 publication Critical patent/JPS5438593B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5293072A 1972-05-30 1972-05-30 Expired JPS5438593B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5293072A JPS5438593B2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5293072A JPS5438593B2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Publications (2)

Publication Number Publication Date
JPS4910179A true JPS4910179A (enrdf_load_stackoverflow) 1974-01-29
JPS5438593B2 JPS5438593B2 (enrdf_load_stackoverflow) 1979-11-21

Family

ID=12928544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5293072A Expired JPS5438593B2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Country Status (1)

Country Link
JP (1) JPS5438593B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03435U (enrdf_load_stackoverflow) * 1989-05-26 1991-01-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03435U (enrdf_load_stackoverflow) * 1989-05-26 1991-01-07

Also Published As

Publication number Publication date
JPS5438593B2 (enrdf_load_stackoverflow) 1979-11-21

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