JPS4897741A - - Google Patents

Info

Publication number
JPS4897741A
JPS4897741A JP2972072A JP2972072A JPS4897741A JP S4897741 A JPS4897741 A JP S4897741A JP 2972072 A JP2972072 A JP 2972072A JP 2972072 A JP2972072 A JP 2972072A JP S4897741 A JPS4897741 A JP S4897741A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2972072A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2972072A priority Critical patent/JPS4897741A/ja
Publication of JPS4897741A publication Critical patent/JPS4897741A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2972072A 1972-03-27 1972-03-27 Pending JPS4897741A (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2972072A JPS4897741A (nl) 1972-03-27 1972-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2972072A JPS4897741A (nl) 1972-03-27 1972-03-27

Publications (1)

Publication Number Publication Date
JPS4897741A true JPS4897741A (nl) 1973-12-12

Family

ID=12283928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2972072A Pending JPS4897741A (nl) 1972-03-27 1972-03-27

Country Status (1)

Country Link
JP (1) JPS4897741A (nl)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438125U (nl) * 1977-08-19 1979-03-13
JPS54101781A (en) * 1978-01-10 1979-08-10 Union Carbide Corp Boat coated with thermal decomposed boron nitride for metal evaporation
US7070658B2 (en) 2003-07-04 2006-07-04 Agfa-Gevaert Vapor deposition apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438125U (nl) * 1977-08-19 1979-03-13
JPS5738365Y2 (nl) * 1977-08-19 1982-08-24
JPS54101781A (en) * 1978-01-10 1979-08-10 Union Carbide Corp Boat coated with thermal decomposed boron nitride for metal evaporation
JPS5919192B2 (ja) * 1978-01-10 1984-05-02 ユニオン・カ−バイド・コ−ポレ−シヨン 金属蒸発の為の熱分解窒化硼素被覆ボ−ト
US7070658B2 (en) 2003-07-04 2006-07-04 Agfa-Gevaert Vapor deposition apparatus

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