JPS4897741A - - Google Patents
Info
- Publication number
- JPS4897741A JPS4897741A JP2972072A JP2972072A JPS4897741A JP S4897741 A JPS4897741 A JP S4897741A JP 2972072 A JP2972072 A JP 2972072A JP 2972072 A JP2972072 A JP 2972072A JP S4897741 A JPS4897741 A JP S4897741A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2972072A JPS4897741A (en) | 1972-03-27 | 1972-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2972072A JPS4897741A (en) | 1972-03-27 | 1972-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4897741A true JPS4897741A (en) | 1973-12-12 |
Family
ID=12283928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2972072A Pending JPS4897741A (en) | 1972-03-27 | 1972-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4897741A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438125U (en) * | 1977-08-19 | 1979-03-13 | ||
| JPS54101781A (en) * | 1978-01-10 | 1979-08-10 | Union Carbide Corp | Boat coated with thermal decomposed boron nitride for metal evaporation |
| US7070658B2 (en) | 2003-07-04 | 2006-07-04 | Agfa-Gevaert | Vapor deposition apparatus |
-
1972
- 1972-03-27 JP JP2972072A patent/JPS4897741A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438125U (en) * | 1977-08-19 | 1979-03-13 | ||
| JPS5738365Y2 (en) * | 1977-08-19 | 1982-08-24 | ||
| JPS54101781A (en) * | 1978-01-10 | 1979-08-10 | Union Carbide Corp | Boat coated with thermal decomposed boron nitride for metal evaporation |
| JPS5919192B2 (en) * | 1978-01-10 | 1984-05-02 | ユニオン・カ−バイド・コ−ポレ−シヨン | Pyrolytic boron nitride coated boat for metal evaporation |
| US7070658B2 (en) | 2003-07-04 | 2006-07-04 | Agfa-Gevaert | Vapor deposition apparatus |