JPS4893270A - - Google Patents
Info
- Publication number
- JPS4893270A JPS4893270A JP2491172A JP2491172A JPS4893270A JP S4893270 A JPS4893270 A JP S4893270A JP 2491172 A JP2491172 A JP 2491172A JP 2491172 A JP2491172 A JP 2491172A JP S4893270 A JPS4893270 A JP S4893270A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2491172A JPS529352B2 (en:Method) | 1972-03-10 | 1972-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2491172A JPS529352B2 (en:Method) | 1972-03-10 | 1972-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4893270A true JPS4893270A (en:Method) | 1973-12-03 |
| JPS529352B2 JPS529352B2 (en:Method) | 1977-03-15 |
Family
ID=12151344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2491172A Expired JPS529352B2 (en:Method) | 1972-03-10 | 1972-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529352B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04263254A (ja) * | 1991-02-18 | 1992-09-18 | Sharp Corp | 露光機構 |
-
1972
- 1972-03-10 JP JP2491172A patent/JPS529352B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04263254A (ja) * | 1991-02-18 | 1992-09-18 | Sharp Corp | 露光機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS529352B2 (en:Method) | 1977-03-15 |