JPS4893260A - - Google Patents

Info

Publication number
JPS4893260A
JPS4893260A JP2424472A JP2424472A JPS4893260A JP S4893260 A JPS4893260 A JP S4893260A JP 2424472 A JP2424472 A JP 2424472A JP 2424472 A JP2424472 A JP 2424472A JP S4893260 A JPS4893260 A JP S4893260A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2424472A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2424472A priority Critical patent/JPS4893260A/ja
Publication of JPS4893260A publication Critical patent/JPS4893260A/ja
Pending legal-status Critical Current

Links

JP2424472A 1972-03-09 1972-03-09 Pending JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2424472A JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-09 1972-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2424472A JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-09 1972-03-09

Publications (1)

Publication Number Publication Date
JPS4893260A true JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-03

Family

ID=12132821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2424472A Pending JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-09 1972-03-09

Country Status (1)

Country Link
JP (1) JPS4893260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335474A (en) * 1976-09-14 1978-04-01 Fujitsu Ltd Fixing method of wafer, mask substrate, and so on

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335474A (en) * 1976-09-14 1978-04-01 Fujitsu Ltd Fixing method of wafer, mask substrate, and so on

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