JPS4891975A - - Google Patents
Info
- Publication number
- JPS4891975A JPS4891975A JP2533472A JP2533472A JPS4891975A JP S4891975 A JPS4891975 A JP S4891975A JP 2533472 A JP2533472 A JP 2533472A JP 2533472 A JP2533472 A JP 2533472A JP S4891975 A JPS4891975 A JP S4891975A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2533472A JPS5213914B2 (es) | 1972-03-08 | 1972-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2533472A JPS5213914B2 (es) | 1972-03-08 | 1972-03-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4891975A true JPS4891975A (es) | 1973-11-29 |
| JPS5213914B2 JPS5213914B2 (es) | 1977-04-18 |
Family
ID=12163015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2533472A Expired JPS5213914B2 (es) | 1972-03-08 | 1972-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213914B2 (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02134844A (ja) * | 1988-11-15 | 1990-05-23 | Nec Corp | 半導体ウェハのダイシング方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5674024U (es) * | 1979-11-09 | 1981-06-17 |
-
1972
- 1972-03-08 JP JP2533472A patent/JPS5213914B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02134844A (ja) * | 1988-11-15 | 1990-05-23 | Nec Corp | 半導体ウェハのダイシング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5213914B2 (es) | 1977-04-18 |