JPS4891970A - - Google Patents
Info
- Publication number
- JPS4891970A JPS4891970A JP2339572A JP2339572A JPS4891970A JP S4891970 A JPS4891970 A JP S4891970A JP 2339572 A JP2339572 A JP 2339572A JP 2339572 A JP2339572 A JP 2339572A JP S4891970 A JPS4891970 A JP S4891970A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2339572A JPS4891970A (pt) | 1972-03-07 | 1972-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2339572A JPS4891970A (pt) | 1972-03-07 | 1972-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4891970A true JPS4891970A (pt) | 1973-11-29 |
Family
ID=12109304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2339572A Pending JPS4891970A (pt) | 1972-03-07 | 1972-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4891970A (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3901981A1 (en) * | 2020-04-24 | 2021-10-27 | IMS Nanofabrication GmbH | Charged-particle source |
-
1972
- 1972-03-07 JP JP2339572A patent/JPS4891970A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3901981A1 (en) * | 2020-04-24 | 2021-10-27 | IMS Nanofabrication GmbH | Charged-particle source |
| US11735391B2 (en) | 2020-04-24 | 2023-08-22 | Ims Nanofabrication Gmbh | Charged-particle source |