JPS489092Y1 - - Google Patents

Info

Publication number
JPS489092Y1
JPS489092Y1 JP9522070U JP9522070U JPS489092Y1 JP S489092 Y1 JPS489092 Y1 JP S489092Y1 JP 9522070 U JP9522070 U JP 9522070U JP 9522070 U JP9522070 U JP 9522070U JP S489092 Y1 JPS489092 Y1 JP S489092Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9522070U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9522070U priority Critical patent/JPS489092Y1/ja
Publication of JPS489092Y1 publication Critical patent/JPS489092Y1/ja
Expired legal-status Critical Current

Links

JP9522070U 1970-09-28 1970-09-28 Expired JPS489092Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9522070U JPS489092Y1 (en) 1970-09-28 1970-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9522070U JPS489092Y1 (en) 1970-09-28 1970-09-28

Publications (1)

Publication Number Publication Date
JPS489092Y1 true JPS489092Y1 (en) 1973-03-09

Family

ID=33258388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9522070U Expired JPS489092Y1 (en) 1970-09-28 1970-09-28

Country Status (1)

Country Link
JP (1) JPS489092Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140113364A (en) 2013-03-15 2014-09-24 엔지케이 인슐레이터 엘티디 Dense composite material, method for producing the same, and component for semiconductor production equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140113364A (en) 2013-03-15 2014-09-24 엔지케이 인슐레이터 엘티디 Dense composite material, method for producing the same, and component for semiconductor production equipment

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