JPS4890581A - - Google Patents
Info
- Publication number
- JPS4890581A JPS4890581A JP2063272A JP2063272A JPS4890581A JP S4890581 A JPS4890581 A JP S4890581A JP 2063272 A JP2063272 A JP 2063272A JP 2063272 A JP2063272 A JP 2063272A JP S4890581 A JPS4890581 A JP S4890581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2063272A JPS4890581A (ja) | 1972-03-01 | 1972-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2063272A JPS4890581A (ja) | 1972-03-01 | 1972-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4890581A true JPS4890581A (ja) | 1973-11-26 |
Family
ID=12032593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2063272A Pending JPS4890581A (ja) | 1972-03-01 | 1972-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4890581A (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3427462A (en) * | 1966-08-05 | 1969-02-11 | Du Pont | Defect detector which simultaneously views a large and small area of the sample |
-
1972
- 1972-03-01 JP JP2063272A patent/JPS4890581A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3427462A (en) * | 1966-08-05 | 1969-02-11 | Du Pont | Defect detector which simultaneously views a large and small area of the sample |