JPS4890547A - - Google Patents

Info

Publication number
JPS4890547A
JPS4890547A JP47021802A JP2180272A JPS4890547A JP S4890547 A JPS4890547 A JP S4890547A JP 47021802 A JP47021802 A JP 47021802A JP 2180272 A JP2180272 A JP 2180272A JP S4890547 A JPS4890547 A JP S4890547A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47021802A
Other languages
Japanese (ja)
Other versions
JPS5536929B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2180272A priority Critical patent/JPS5536929B2/ja
Priority to US00252020A priority patent/US3739247A/en
Priority to GB2324672A priority patent/GB1396691A/en
Priority to DE2224083A priority patent/DE2224083C3/de
Priority to NL7206653A priority patent/NL7206653A/xx
Publication of JPS4890547A publication Critical patent/JPS4890547A/ja
Publication of JPS5536929B2 publication Critical patent/JPS5536929B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP2180272A 1971-05-17 1972-03-02 Expired JPS5536929B2 (en:Method)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2180272A JPS5536929B2 (en:Method) 1972-03-02 1972-03-02
US00252020A US3739247A (en) 1971-05-17 1972-05-10 Positioning device using photoelectric scanning
GB2324672A GB1396691A (en) 1971-05-17 1972-05-17 Positioning device using photoelectric scanning
DE2224083A DE2224083C3 (de) 1971-05-17 1972-05-17 Photoelektrische Positioniereinrichtung
NL7206653A NL7206653A (en:Method) 1971-05-17 1972-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2180272A JPS5536929B2 (en:Method) 1972-03-02 1972-03-02

Publications (2)

Publication Number Publication Date
JPS4890547A true JPS4890547A (en:Method) 1973-11-26
JPS5536929B2 JPS5536929B2 (en:Method) 1980-09-25

Family

ID=12065175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2180272A Expired JPS5536929B2 (en:Method) 1971-05-17 1972-03-02

Country Status (1)

Country Link
JP (1) JPS5536929B2 (en:Method)

Also Published As

Publication number Publication date
JPS5536929B2 (en:Method) 1980-09-25

Similar Documents

Publication Publication Date Title
FR2199172B1 (en:Method)
JPS4936424A (en:Method)
JPS4986554U (en:Method)
JPS4911U (en:Method)
JPS48101832U (en:Method)
JPS5352117Y2 (en:Method)
JPS5729289B2 (en:Method)
JPS5536929B2 (en:Method)
JPS4927887A (en:Method)
CS156890B1 (en:Method)
JPS4966239A (en:Method)
JPS48101573U (en:Method)
CS156987B1 (en:Method)
JPS4892212U (en:Method)
CS154024B1 (en:Method)
CS152690B1 (en:Method)
CH1468072A4 (en:Method)
CH583168A5 (en:Method)
CH599224A5 (en:Method)
DD98219A1 (en:Method)
CH603574A5 (en:Method)
CH575946A5 (en:Method)
CH568085A5 (en:Method)
BG17033A1 (en:Method)
CH590333A5 (en:Method)