JPS4890474A - - Google Patents

Info

Publication number
JPS4890474A
JPS4890474A JP2165772A JP2165772A JPS4890474A JP S4890474 A JPS4890474 A JP S4890474A JP 2165772 A JP2165772 A JP 2165772A JP 2165772 A JP2165772 A JP 2165772A JP S4890474 A JPS4890474 A JP S4890474A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2165772A
Other languages
Japanese (ja)
Other versions
JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2165772A priority Critical patent/JPS5143942B2/ja
Publication of JPS4890474A publication Critical patent/JPS4890474A/ja
Publication of JPS5143942B2 publication Critical patent/JPS5143942B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2165772A 1972-03-02 1972-03-02 Expired JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2165772A JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-02 1972-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2165772A JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-02 1972-03-02

Publications (2)

Publication Number Publication Date
JPS4890474A true JPS4890474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26
JPS5143942B2 JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-25

Family

ID=12061104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2165772A Expired JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-02 1972-03-02

Country Status (1)

Country Link
JP (1) JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513778A (en) * 1974-06-24 1976-01-13 Owens Illinois Inc Shirikono doopingushorisurutameno aruminiumumetahosufueetogen
JPWO2008066088A1 (ja) * 2006-11-29 2010-03-11 電気化学工業株式会社 ホウ素拡散源の使用方法及び半導体の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043819U (ja) * 1983-09-05 1985-03-28 大阪瓦斯株式会社 ラジアントチユ−ブバ−ナ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513778A (en) * 1974-06-24 1976-01-13 Owens Illinois Inc Shirikono doopingushorisurutameno aruminiumumetahosufueetogen
JPWO2008066088A1 (ja) * 2006-11-29 2010-03-11 電気化学工業株式会社 ホウ素拡散源の使用方法及び半導体の製造方法

Also Published As

Publication number Publication date
JPS5143942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-25

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