JPS4890053A - - Google Patents

Info

Publication number
JPS4890053A
JPS4890053A JP2260672A JP2260672A JPS4890053A JP S4890053 A JPS4890053 A JP S4890053A JP 2260672 A JP2260672 A JP 2260672A JP 2260672 A JP2260672 A JP 2260672A JP S4890053 A JPS4890053 A JP S4890053A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2260672A
Other versions
JPS5344699B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2260672A priority Critical patent/JPS5344699B2/ja
Publication of JPS4890053A publication Critical patent/JPS4890053A/ja
Publication of JPS5344699B2 publication Critical patent/JPS5344699B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Combined Means For Separation Of Solids (AREA)
JP2260672A 1972-03-04 1972-03-04 Expired JPS5344699B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2260672A JPS5344699B2 (ja) 1972-03-04 1972-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2260672A JPS5344699B2 (ja) 1972-03-04 1972-03-04

Publications (2)

Publication Number Publication Date
JPS4890053A true JPS4890053A (ja) 1973-11-24
JPS5344699B2 JPS5344699B2 (ja) 1978-11-30

Family

ID=12087488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2260672A Expired JPS5344699B2 (ja) 1972-03-04 1972-03-04

Country Status (1)

Country Link
JP (1) JPS5344699B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110758A (ja) * 1975-03-25 1976-09-30 Kawasaki Heavy Ind Ltd Gomibunbetsusochi

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016168331A (ja) * 2015-03-10 2016-09-23 泰貴 服部 薄皮除去装置及び薄皮除去方法
JP7067465B2 (ja) * 2018-12-27 2022-05-16 株式会社Sumco 半導体ウェーハの評価方法及び半導体ウェーハの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110758A (ja) * 1975-03-25 1976-09-30 Kawasaki Heavy Ind Ltd Gomibunbetsusochi
JPS5710785B2 (ja) * 1975-03-25 1982-02-27

Also Published As

Publication number Publication date
JPS5344699B2 (ja) 1978-11-30

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