JPS4890053A - - Google Patents
Info
- Publication number
- JPS4890053A JPS4890053A JP2260672A JP2260672A JPS4890053A JP S4890053 A JPS4890053 A JP S4890053A JP 2260672 A JP2260672 A JP 2260672A JP 2260672 A JP2260672 A JP 2260672A JP S4890053 A JPS4890053 A JP S4890053A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2260672A JPS5344699B2 (ja) | 1972-03-04 | 1972-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2260672A JPS5344699B2 (ja) | 1972-03-04 | 1972-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4890053A true JPS4890053A (ja) | 1973-11-24 |
| JPS5344699B2 JPS5344699B2 (ja) | 1978-11-30 |
Family
ID=12087488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2260672A Expired JPS5344699B2 (ja) | 1972-03-04 | 1972-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5344699B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51110758A (ja) * | 1975-03-25 | 1976-09-30 | Kawasaki Heavy Ind Ltd | Gomibunbetsusochi |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016168331A (ja) * | 2015-03-10 | 2016-09-23 | 泰貴 服部 | 薄皮除去装置及び薄皮除去方法 |
| JP7067465B2 (ja) * | 2018-12-27 | 2022-05-16 | 株式会社Sumco | 半導体ウェーハの評価方法及び半導体ウェーハの製造方法 |
-
1972
- 1972-03-04 JP JP2260672A patent/JPS5344699B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51110758A (ja) * | 1975-03-25 | 1976-09-30 | Kawasaki Heavy Ind Ltd | Gomibunbetsusochi |
| JPS5710785B2 (ja) * | 1975-03-25 | 1982-02-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5344699B2 (ja) | 1978-11-30 |