JPS4889887A - - Google Patents

Info

Publication number
JPS4889887A
JPS4889887A JP2154872A JP2154872A JPS4889887A JP S4889887 A JPS4889887 A JP S4889887A JP 2154872 A JP2154872 A JP 2154872A JP 2154872 A JP2154872 A JP 2154872A JP S4889887 A JPS4889887 A JP S4889887A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2154872A
Other languages
Japanese (ja)
Other versions
JPS5431471B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2154872A priority Critical patent/JPS5431471B2/ja
Publication of JPS4889887A publication Critical patent/JPS4889887A/ja
Publication of JPS5431471B2 publication Critical patent/JPS5431471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2154872A 1972-03-03 1972-03-03 Expired JPS5431471B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2154872A JPS5431471B2 (en:Method) 1972-03-03 1972-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2154872A JPS5431471B2 (en:Method) 1972-03-03 1972-03-03

Publications (2)

Publication Number Publication Date
JPS4889887A true JPS4889887A (en:Method) 1973-11-24
JPS5431471B2 JPS5431471B2 (en:Method) 1979-10-06

Family

ID=12058026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2154872A Expired JPS5431471B2 (en:Method) 1972-03-03 1972-03-03

Country Status (1)

Country Link
JP (1) JPS5431471B2 (en:Method)

Also Published As

Publication number Publication date
JPS5431471B2 (en:Method) 1979-10-06

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