JPS4889794A - - Google Patents

Info

Publication number
JPS4889794A
JPS4889794A JP48016340A JP1634073A JPS4889794A JP S4889794 A JPS4889794 A JP S4889794A JP 48016340 A JP48016340 A JP 48016340A JP 1634073 A JP1634073 A JP 1634073A JP S4889794 A JPS4889794 A JP S4889794A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48016340A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4889794A publication Critical patent/JPS4889794A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/30Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP48016340A 1972-02-09 1973-02-09 Pending JPS4889794A (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH191872A CH570610A5 (OSRAM) 1972-02-09 1972-02-09

Publications (1)

Publication Number Publication Date
JPS4889794A true JPS4889794A (OSRAM) 1973-11-22

Family

ID=4221617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48016340A Pending JPS4889794A (OSRAM) 1972-02-09 1973-02-09

Country Status (12)

Country Link
US (1) US3842267A (OSRAM)
JP (1) JPS4889794A (OSRAM)
BE (1) BE795278A (OSRAM)
CA (1) CA983581A (OSRAM)
CH (1) CH570610A5 (OSRAM)
DE (1) DE2305102A1 (OSRAM)
FR (1) FR2171824A5 (OSRAM)
GB (1) GB1394155A (OSRAM)
IE (1) IE37274B1 (OSRAM)
IT (1) IT992543B (OSRAM)
LU (1) LU66996A1 (OSRAM)
NL (1) NL7301762A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311808A (ja) * 1986-07-02 1988-01-19 Mitsubishi Electric Corp 膜厚監視装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
US4010366A (en) * 1975-09-22 1977-03-01 Xerox Corporation Measurement of the mass and charge of charged particles
TW222650B (OSRAM) * 1991-04-01 1994-04-21 Dow Corning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2694151A (en) * 1953-06-26 1954-11-09 Cons Eng Corp Mass spectrometry
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
US2958774A (en) * 1957-05-07 1960-11-01 Ca Nat Research Council Omegatron with orbit increment detection
NL109528C (OSRAM) * 1958-03-15
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311808A (ja) * 1986-07-02 1988-01-19 Mitsubishi Electric Corp 膜厚監視装置

Also Published As

Publication number Publication date
CH570610A5 (OSRAM) 1975-12-15
FR2171824A5 (OSRAM) 1973-09-21
GB1394155A (en) 1975-05-14
IT992543B (it) 1975-09-30
IE37274L (en) 1973-08-09
BE795278A (fr) 1973-08-09
DE2305102A1 (de) 1973-08-16
IE37274B1 (en) 1977-06-22
CA983581A (en) 1976-02-10
US3842267A (en) 1974-10-15
NL7301762A (OSRAM) 1973-08-13
LU66996A1 (OSRAM) 1973-04-19

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