JPS4885486A - - Google Patents

Info

Publication number
JPS4885486A
JPS4885486A JP1643072A JP1643072A JPS4885486A JP S4885486 A JPS4885486 A JP S4885486A JP 1643072 A JP1643072 A JP 1643072A JP 1643072 A JP1643072 A JP 1643072A JP S4885486 A JPS4885486 A JP S4885486A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1643072A
Other languages
Japanese (ja)
Other versions
JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1643072A priority Critical patent/JPS5124995B2/ja
Publication of JPS4885486A publication Critical patent/JPS4885486A/ja
Publication of JPS5124995B2 publication Critical patent/JPS5124995B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1643072A 1972-02-18 1972-02-18 Expired JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1643072A JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1643072A JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Publications (2)

Publication Number Publication Date
JPS4885486A true JPS4885486A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-13
JPS5124995B2 JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-28

Family

ID=11916007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1643072A Expired JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Country Status (1)

Country Link
JP (1) JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5124995B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-28

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